Semiconductor Equipment

Semiconductor manufacturing and processes are facing new and difficult challenges. Global supply chain issues, speed and cost to market, accuracy, and space constraints just to name a few. Yokogawa has been a partner to Semiconductor Equipment manufacturers for decades. Yokogawa not only provides the technology to overcome obstacles in manufacturing processes, but we also work with you to achieve stable supply chains, increase speed to market, bring down cost, and improve quality. Yokogawa is a global company providing industry leading service and support to our customers. See what Yokogawa can do for you.

Industry Challenges. Yokogawa Solutions.

Performance

Ever increasing demand on chip performance across computing, communication, gaming, and AI to name a few demand the latest technological innovations and partnerships.

 

Speed to Market

This industry is dynamic and requires rapid response and innovations.  The right partners can make the difference.

Supply Chain

Global logistics are a major issue for everyone.  Having a proven global partner with built in processes to keep global supply on time is critical to success.

Wafer Process

Etching

Yokogawa Controller e-RT3 makes Centralized control to Distributed control to improve

  • Time to market
  • Performance (=Higher speed, synchronize ability)

One of our customer used to control the machine with one powerful PC to control chambers, rest of controls has done by VME boards that connected with serial communication between PC. This system has issues such as low customization because of complex design, non real time control if the number of chambers increase. 
 

Details

Semiconductor Manufacturing Process

semiconductor equipment details1

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Centralized control to Distributed Control to reduce takt time thanks to e-RT3 Plus

 

Customer’s problem

1. Customization of chambers is difficult because of complex design with one PC configuration. 
    Design matched each end-user’s application is not possible.
2. With one PC, real-time control does no work properly if the number of chambers increases.
    (Delay happens at concurrent control)

semiconductor equipment details3

 

Solution

1. Reduce the load of PC by installing edge controller in each chambers
2. Realize real-time control by multiple e-RT3s
3. Stable supply

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