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NanoStage PLANESERV |
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NanoStage is the planar surface motor traveling freely and precisely positioning on the flat surface stage that is enabled by contact-free structure featured by air-bearing. The semiconductor laser interferometer built-in the slider not only offers the high accuracy and high speed responsibility but also allows to down-size the motor dimensions. |
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■High accuracy •Resolution27nm,repeatability±0.1µm(XY)(0.05angle second(θ)) •End-point feedback control of X/Y/θpositions with a semiconductor laser interferometer positioning accuracy±1µm(linearity:2 ppm@500 mm) •Averaging of plane error via air flotation ■High-speed response •Settling time: 20µs(position control bandwidth is 50 Hz with a settling width of 1µm) •No special mechanism or friction through the use of air flotation ■Compact size •Weight of moving section: 9kg •Equipped with a small-size interferometer using a semiconductor laser •Integral XY drive motor structure •Non-contact, air-flotation structure |
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