TandemThroughStage
Yokogawa has developed TandemThroughStage, a next-generation platform that will revolutionize the flat panel display (FPD) production process. In addition to having a large X-Y stage that is capable of handling 8th generation mother glass substrates, this product is equipped with a substrate transport robot. By integrating FPD manufacturing devices with a transfer robot, TandemThroughStage helps boost the productivity of an entire production line.
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| Without the use of speed reduction devices such as gears, this special factory automation (FA) servomotor is capable of precise rotation control, with more than four million steps per rotation. This product has been employed in a wide range of FA devices and equipment, particularly semiconductor manufacturing devices, label printers, and index devices. |
| LINEARSERV is a linear servomotor with a direct drive mechanism. A full-closed loop is formed using a built-in optical linear encoder, developed with Yokogawa’s own technology, to achieve highly accurate positioning control. Unlike AC servomotors with ball screws, this product is capable of smooth driving. To serve a variety of applications, 18 stroke lengths in the range of 50–1800 mm, 4 thrust levels in the range of 50–400 N, and 4 models (standard model, high-rigidity model, high-speed model, and a high-rigidity and high-speed model) are available. |
| Intelligent drives are dedicated drives for LINEARSERV and DYNASERV direct drive servomotors that have been developed for greater control performance and operability. We offer users a Windows-based support tool that eases operation of both motor and drive. |
| By integrating LINEARSERV and DYNASERV, this positioning stage automatically performs positioning for customers. This all-in-one product offers greater stage accuracy and saves customers time and effort. |
| BridgeStage is a platform for liquid crystal display (LCD) and plasma display panel (PDP) manufacturing devices that is capable of handling eighth-generation glass substrates. Thanks to its optimum design based on structural analysis, BridgeStage has no need for a stone surface plate and is equipped with a DDM linear motor for highly efficient control, enabling users to meet tight deadlines. The BridgeStage XY stage is suitable for coater, developer, inspection, and repair devices. |
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